
XYZCalibrationNanogrid;ArrayswithDownto500nmPitch;20nmHeight
ProductDescriptionWhyXYZCalibrationNanogrid?InordertomakethemostoftheirmeasurementcapABIlities,AFMsystemsneedtobeproperlycalibrated.Themoreaccurateyourcalibrationstandard,themoreaccurateAFMmeasurementresultscanbeachieved.Inthisrespect,nanogridcalibrationstandardsallowthemostpreciseAFMsystemcalibration.
Thesolution:CS-20NGisanadvancedXYZcalibrationnanogridthatenablescalibrationuptothenanometerlevel.Itfeaturessilicondioxidestructurearraysona5x5mmsiliconchip.Thefabricationprocessguaranteesexcellentuniformityofthestructuresacrossthechip.ThisinturnensureseasyandreliableX,YandZaxiscalibrationofyourAFMsystem.
Thecalibrationareaissituatedinthecenterofthechip.ItiseasytofindwiththeAFMopticalsystem.
Thestructurestepheightisintherangeof20nm.Theexactvalueforeachchipisindicatedontheboxlabel.Arraysofstructureswithdifferentshapeandpitchareintegratedonthechip.Thelargesquare(1x1mm)containssquarepillarsandholeswitha10umpitch.ThemiddlesquarecontainscircularpillarsandholesaswellaslinesintheX-andY-directionwitha5umpitch.Thesmallsquarecontainscircularholeswitha500nmpitch.
TheCS-20NGissuitableforbothlateralandverticalAFMscannercalibration.ThestructuresymmetrymakesitpossIBLetocalibrateyourAFMsysteminonestepwithoutrotatingthesamplein-betweenX-andY-axiscalibration.
TheCS-20NGchipisgluedontoa12mmmetaldiscusingahigh-qualityelectricallyconductiveepoxyresinanditisreadyforuseasshipped.Itisalsoavailableunmounted(CS-20NG-UM).
Diesize:5x5mm
Stepheight:~20nm(precisevalueindicatedonthelabelofeachbox)
Structuregeometry:
- Squareholesandpillarswith10µmpitcharrangedina1x1mmsquare
- Circularpillarsandholes,andlinesinthex-andy-directionwitha5µmpitcharrangedina500x500µmsquare
- Circularholeswitha500nmpitcharrangedina100x100µmsquare